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CORRELATIVE PROBE ELECTRON MICROSCOPY ANALYSIS OF PLASMA-TREATED GALLIUM-DOPED ZINC OXIDE NANORODS

1 RUTHERFORD David
Co-authors:
2 REMES Zdenek 3 MICOVA Julia 1 UKRAINTSEV Egor 1 REZEK Bohuslav
Institutions:
1 Faculty of Electrical Engineering, Czech Technical University in Prague, Prague, Czech Republic, EU
2 Institute of Physics, Czech Academy of Sciences, Prague, Czech Republic, EU
3 Institute of Chemistry, Slovak Academy of Sciences, Bratislava, Slovakia, EU
Conference:
15th International Conference on Nanomaterials - Research & Application, OREA Congress Hotel Brno, Czech Republic, EU, October 18 - 20, 2023
Proceedings:
Proceedings 15th International Conference on Nanomaterials - Research & Application
Pages:
353-359
ISBN:
978-80-88365-15-0
ISSN:
2694-930X
DOI:
https://doi.org/10.37904/nanocon.2023.4762
Published:
1st January 2024
Metrics:
253 views / 151 downloads
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Abstract

Correlative Probe Electron Microscopy (CPEM) was used to investigate the topographical and electronic emission properties of gallium-doped zinc oxide nanorods (ZnO:Ga) after low pressure hydrogen or oxygen plasma treatment. Simultaneous secondary electron (SE) and back-scattered electron (BSE) emission information from the same nanorods enabled true correlation with the topographical information obtained by atomic force microscopy (AFM). All nanorods were analyzed in-situ on the same substrate using the same experimental parameters which allowed for accurate comparison. ZnO:Ga nanorods displayed the largest SE emission intensity as well as the greatest BSE emission intensity. Hydrogen plasma treatment reduced both SE and BSE emission intensity, whereas oxygen plasma treatment only reduced SE emission. These effects may help elucidate various optical as well as biological interactions of ZnO:Ga nanorods.

Keywords: keywords: Correlative microscopy, SEM, AFM, ZnO nanorods, plasma treatment

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