LARGE AREA CLEANING AND ACTIVATION OF FLEXIBLE ULTRA-THIN GLASS BY NON-THERMAL ATMOSPHERIC-PRESSURE PLASMA

1 SIHELNÍK Slavomír
Co-authors:
1 KRUMPOLEC Richard 1 STUPAVSKÁ Monika 1 FENG Jianyu 1 KOSOVÁ Eva 1 KELAR Jakub 1,2 ZEMÁNEK Miroslav 1,2 KOVÁČIK Dušan 1 ČERNÁK Mirko
Institutions:
1 Masaryk University, Faculty of Science, CEPLANT, Department of Physical Electronics, Brno, Czech Republic, EU, sihelnik@mail.muni.cz
2 ROPLASS s. r. o., Kamenice, Brno, Czech Republic, EU
Conference:
12th International Conference on Nanomaterials - Research & Application, Brno, Czech Republic, EU, October 21 - 23, 2020
Proceedings:
Proceedings 12th International Conference on Nanomaterials - Research & Application
Pages:
305-310
ISBN:
978-80-87294-98-7
ISSN:
2694-930X
Published:
28th December 2020
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
989 views / 469 downloads
Abstract

Flexible ultra-thin glass is used as a substrate or packaging material in microelectronics engineering, where the level of cleanliness determines the quality of the final product. Surface properties of glass are governed by a surface nano-layer. Besides cleaning from coarse impurities, the demand is also for nano-decontamination, where standard cleaning proves insufficient. In microelectronics and printed flexible electronics, the bonding of thin structures deposited using printed conductive inks on glass substrates is of essential importance. The non-thermal, atmospheric-pressure plasma generated by diffuse coplanar surface barrier discharge (DCSBD) was studied as an effective pre-treatment method for cleaning and activation of glass surfaces, implementable into large-scale in-line manufacturing. Two industrial adaptations of DCSBD system were applied on two types of ultra-thin flexible glass to compare the effects of plasma treatment of glass in both relaxed, and bent state. DCSBD "Air-pillow" with a planar discharge unit is designed for contactless treatment of smooth flat large-area surfaces. A roll reactor with a concavely curved DCSBD unit is intended to exemplify its integration into roll-to-roll manufacturing. The effect of plasma treatment and its stability was analyzed with water contact angle measurement and X-ray photoelectron spectroscopy. Significant wettability improvement was achieved with both applied DCSBD geometries, with better effect uniformity and durability after using the DCSBD in the planar configuration.

Keywords: Atmospheric plasma treatment, ultra-thin flexible glass, wetting, large-area, roll-to-roll

© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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