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RELATION BETWEEN OPTICAL AND MICROSCOPIC PROPERTIES OF HYDROGENATED SILICON THIN FILMS WITH INTEGRATED GERMANIUM AND TIN NANOPARTICLES

1 STUCHLIK Jiri
Co-authors:
1 STUCHLIKOVA The Ha 1 CERMAK Jan 2 KUPCIK Jaroslav 2 FAJGAR Radek 1 REMES Zdenek
Institutions:
1 Czech Academy of Sciences, Institute of Physics, Prague, Czech Republic, stuj@fzu.cz, hotheha@fzu.cz, cermakj@fzu.cz, remes@fzu.cz
2 Institute of Chemical Process Fundamentals of the CAS, Prague, Czech Republic, kupcik@icpf.cas.cz, fajgar@icpf.cas.cz
Conference:
10th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 17th - 19th 2018
Proceedings:
Proceedings 10th International Conference on Nanomaterials - Research & Application
Pages:
83-87
ISBN:
978-80-87294-89-5
ISSN:
2694-930X
Published:
28th February 2019
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
690 views / 340 downloads
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Abstract

The hydrogenated amorphous silicon layers (a-Si:H) were deposited by PECVD method on quartz substrates. During interruption of PECVD process the vacuum chamber was pumped up to 10-5 Pa and 1 nm thin films of Germanium or Tin were evaporated on the surface. The materials form isolated nanoparticles (NPs) on the a-Si:H surface. Then the deposited NPs were covered and stabilized by a-Si:H layer by PECVD. Those two deposition processes were alternated 5 times. The a-Si:H thin films with integrated Ge or Sn NPs were characterized optically by PDS and CPM methods, and microscopically by SEM and AFM microscopies. Optical and microscopic properties of the structures are correlated and discussed considering their application in photovoltaics.

Keywords: Thin films, a-Si:H, nanoparticles, Germanium, Tin

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