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Gas aggregation sources based on physical vapour deposition are nowadays commonly used for the preparation of metallic nanoparticles or composite nanostructures containing metals, oxides, nitrides, polymers, etc. The most common configuration of the device for the preparation of core-shell Ni-Ti nanoparticles consists of the primary aggregating source producing the Ni core followed by a second chamber with a Ti target overcoating the core by a shell. The size distribution of core nanoparticles and the thickness and homogeneity of the shell depend on the geometry of the deposition chambers, pressures of working gas, and the power (current, voltage) on both magnetrons. Unfortunately, the power on the Ti magnetron could significantly modify not only the parameters of the coated layer but also the size of the Ni core. The influence of the Ti magnetron current on the final size and homogeneity of complex core-shell particles was studied by high-resolution transmission electron microscopy, scanning (transmission) electron microscopy, and energy-dispersive X-ray spectroscopy. A threshold current value leading to significant morphological changes of nanoparticles was identified.
Keywords: NiTi nanoparticles, magnetron sputtering, core shell, TEM© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.