Open Access Conference Proceedings

Tungsten carbide (WC) is in the groups hard materials, which is used for cutting tool. The substrate sample was coated with device PVD. Coatings nc-WC/a-C:H were deposited in a vacuum chamber by magnetron sputtering. This device has four independent planar magnetrons with circular targets. Three targets were made from pure graphite and one form pure tungsten. Tungsten carbide is approximately two times stiffer than steel, with a Young's modulus of approximately 650–700 GPa. At the end of the coating process Ar / methane (Ar 25 sccm / CH4 12.5 sccm) was admitted to chamber, which gets into the surface layer. The parameters of the process influence properties of the thin films were amourphous microstructure, hardness and adhesion to the substrate. The tribological measurements were performed the “ball-on-disc” testing method. Tribological testing (EN1071-13:2010) was performed using a ball made from Si3N4 with a diameter of 5 mm, with a constant load of 10 N at room temperature and humidity of 40 ±2 %. The results were analysed by profilometer and optical microscope.

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